DocumentCode
564773
Title
Thermal analysis of LTCC packaged MEMS atomic clock
Author
Chutani, Ravinder ; Galliou, Serge ; Passilly, Nicolas ; Gorecki, Christophe ; Sitomaniemi, Aila ; Heikkinen, Mikko ; Kautio, Kari ; Keränen, Antti ; Jornod, Alain
Author_Institution
Inst. FEMTO-ST, UFC, Besancon, France
fYear
2012
fDate
25-27 April 2012
Firstpage
171
Lastpage
173
Abstract
This paper describes the thermal analysis of LTCC packaged Cs vapour cell for MEMS atomic clock. Aim is to maintain the temperature of the inner cell trapping the Cs vapour, which is a critical parameter for stable MEMS atomic clock.
Keywords
atomic clocks; ceramic packaging; micromechanical devices; thermal analysis; LTCC packaged Cs vapour cell; LTCC packaged MEMS atomic clock; inner cell trapping; low temperature cofired ceramic package; stable MEMS atomic clock; thermal analysis; Atomic clocks; Coatings; Electronic packaging thermal management; Micromechanical devices; Temperature control; Temperature distribution; Temperature sensors; LTCC package; MEMS; atomic clock; thermal analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2012 Symposium on
Conference_Location
Cannes
Print_ISBN
978-1-4673-0785-7
Type
conf
Filename
6235313
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