Title :
Micropatterning and casting PEDOT-PSS /DMSO layers
Author :
Charlot, Benoît ; Sassine, Gilbert ; Garraud, Alexandra ; Giani, Alain ; Combette, Philippe
Author_Institution :
Inst. d´´Electron. du Sud, Univ. Montpellier II, Montpellier, France
Abstract :
PEDOT:PSS is a conductive polymer that is widely used as electrodes in organic electronic devices. This material can also be used for implementing deformable electrodes in soft substrates for MEMS applications. However, this material being sensitive to several chemicals and water it is difficult to pattern microstructures using standard techniques. Thus, we present several techniques for patterning PEDOT:PSS conductive polymer thin film layers including PDMS Casting, shadow masking and lithography.
Keywords :
casting; crystal microstructure; masks; microfabrication; micromechanical devices; semiconductor thin films; MEMS applications; PEDOT-PSS conductive polymer thin film layers; PEDOT-PSS-DMSO layer casting; conductive polymer; deformable electrodes; electrodes; lithography; micropatterning; microstructure patterning; organic electronic devices; Etching; Glass; Lithography; Plasmas; Polymers; Substrates;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2012 Symposium on
Conference_Location :
Cannes
Print_ISBN :
978-1-4673-0785-7
