Design on control system of high precision micro-displacement platform

The control system of high precision micro-displacement platform has been designed according to the high precision, high speed and high stability requirements. A hardware platform has been established with 24-bit A/D chip, D/A chip, and TMS320C6713 DSP chip. An improved PID control algorithm was put forward combining set-point weighting control algorithm, resisting saturation of integral with tracking coefficient control algorithm, differential forward control algorithm and incomplete differential control algorithm. The algorithm is simulated in the Matlab environment. The results show that this control system has high control accuracy, fast response, non-overshoot and strong stability.