Study on active vibration isolation based on electromagnetic responses

A new method was adapted in the project that isolated vibration for precise mechanical equipment. There are four electromagnet actuators which are arranged differentially between equipment and vibrational base. The electromagnetic force and the control current are linear relation approximately. The absolute velocity feedback control method which can keep the vibration isolation capability of high frequency and advance the vibration isolation capability of low frequency is adopted in this paper according to the characteristic of frequency domain. There are two methods applied to verify the control method, one is the simulated analysis by matlab platform, the other is experiment. Finally, the results of simulation are compared against the experimental results are satisfied, the high frequency amplitude of z-DOF is 2×10⁻⁷m, and the low frequency amplitude of z-DOF is 5×10⁻⁶m.