Magnetic-field line sensor using poly-Si micro Hall devices

We have developed a magnetic-field line sensor using poly-Si micro Hall devices. First, we fabricate the micro Hall devices using low-temperature poly-Si fabrication processes. Next, we measure the dependences of the Hall voltage (V_H) on the magnetic field (B) for each micro Hall device and verify that V_H is linear to B although V_H has an offset voltage that varies among each device even if B is zero. Finally, we succeed in detecting the distribution of the magnetic field along a line using the poly-Si micro Hall devices arrayed in a line, which is confirmed by comparing the detected result with that obtained using a conventional Gauss meter.