High speed piezoelectric motor

Author

Shieh, Yun-Jui ; Ting, Yung ; Hou, Bing-Kuan ; Yeh, Chin-Chih

Author_Institution

Dept. of Mech. Eng., Chung Yuan Christian Univ., Chungli, Taiwan

fYear

2012

fDate

9-13 July 2012

Firstpage

1

Lastpage

3

Abstract

A wedge-type piezoelectric motor that can generate high-speed linear or rotary motion is developed. Such a new type of composite piezoelectric ceramic material is constructed with d33 contributing the longitudinal deformation and d15 contributing the shear deformation. Instead of using two individual ceramics to obtain the desired hybrid motion profile, this new approach has the advantage of only using a sole ceramic with appropriate poling method. Analytical simulation and experiment results of resonant frequency and vibration amplitude are in a good agreement. By means of suitable design positioning accuracy less than 100nm at high speed of 600mm/sec. is feasible.

Keywords

ceramics; composite materials; piezoelectric materials; piezoelectric motors; shear deformation; vibrations; composite piezoelectric ceramic material; high speed piezoelectric motor; high-speed linear motion; longitudinal deformation; poling method; resonant frequency; rotary motion; shear deformation; vibration amplitude; wedge-type piezoelectric motor; Acoustics; Ceramics; Displacement measurement; Piezoelectric materials; Q factor; Resonant frequency; Vibrations; wedge-type piezoelectric motor;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics held jointly with 2012 European Conference on the Applications of Polar Dielectrics and 2012 International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 Intl Symp

Conference_Location

Aveiro

Print_ISBN

978-1-4673-2668-1

Type

conf

DOI

10.1109/ISAF.2012.6297745

Filename

6297745