A novel two degree-of-freedom ultrasonic planar motor driven by single stator

Author

Yan, Liang ; Hu, Yingyi ; Lan, Hua ; Yao, Nan ; Jiao, Zongxia ; Chen, I-Ming

Author_Institution

Sch. of Autom. Sci. & Electr. Eng., Beihang Univ., Beijing, China

fYear

2012

fDate

25-27 July 2012

Firstpage

550

Lastpage

553

Abstract

A novel two degree-of-freedom (DOF) ultrasonic planar motor based on traveling wave has been proposed in this paper. The stator is the key component of the planar motor. The proposed stator is in a bar type, consisting of three piezoelectric ceramic cylinders and a metal driving head. The effective elliptical motion of the driving head tip is formed by the second bending mode and the first longitude mode of the stator. The two working vibration modes are analyzed by FEM software, and the dimensions of the stator are optimized and determined via FEA. As a result of the optimization, frequencies of the two working modes are very close to 22 kHz. The major feature of the design is the multi-DOF motion achieved by a single stator.

Keywords

finite element analysis; optimisation; shapes (structures); stators; ultrasonic motors; vibrations; FEA; FEM software; frequency 22 kHz; metal driving head; multiDOF motion; optimization; piezoelectric ceramic cylinders; single stator; traveling wave; two degree-of-freedom ultrasonic planar motor; vibration modes; Acoustics; Ceramics; Educational institutions; Finite element methods; Planar motors; Stators; Vibrations; piezoelectricity; planar motor; ultrasonic motor;

fLanguage

English

Publisher

ieee

Conference_Titel

Industrial Informatics (INDIN), 2012 10th IEEE International Conference on

Conference_Location

Beijing

Print_ISBN

978-1-4673-0312-5

Type

conf

DOI

10.1109/INDIN.2012.6301369

Filename

6301369