DocumentCode
571871
Title
Laser voltage probing in failure analysis of advanced integrated circuits on SOI
Author
Ravikumar, V.K. ; Wampler, R. ; Ho, M.Y. ; Christensen, J. ; Phoa, S.L.
Author_Institution
Adv. Micro Devices Singapore Pte Ltd., Singapore, Singapore
fYear
2012
fDate
2-6 July 2012
Firstpage
1
Lastpage
4
Abstract
Laser voltage probing is the newest generation of tools that perform timing analysis for electrical fault isolation in advanced failure analysis facilities. This paper uses failure analysis case studies on SOI to showcase the implementation of laser voltage probing in the failure analysis flow and highlight its significance in root-cause identification.
Keywords
failure analysis; fault location; silicon-on-insulator; SOI; advanced failure analysis facility; advanced integrated circuit; electrical fault isolation; laser voltage probing; root cause identification; timing analysis; Absorption; Clocks; Failure analysis; Frequency modulation; Lasers; MOS devices; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Physical and Failure Analysis of Integrated Circuits (IPFA), 2012 19th IEEE International Symposium on the
Conference_Location
Singapore
ISSN
1946-1542
Print_ISBN
978-1-4673-0980-6
Type
conf
DOI
10.1109/IPFA.2012.6306297
Filename
6306297
Link To Document