Title :
Failure analysis of latent damage in low temperature poly-silicon TFT for OLED applications
Author :
Kim, Dong-Sun ; Lim, Chun-Bae ; Jung, Seung-Won ; Oh, Du-Seok ; Kim, Hyung-Tae ; Ho, Won-Joon ; Jung, Ju-Young ; Shim, Jong-Pil ; Kim, Tae-Young ; Suh, Kwang S.
Author_Institution :
MTC, LG Display, Paju, South Korea
Abstract :
Optical microscope and FIB were widely used to find out defect locations in display panels. But failure analysis of LTPS TFTs is getting more difficult to detect the locations than that of (a-Si:H) TFTs. We adopted FIB and EMMI tool and found the leakage path on some special function failure such as line defect in display panel. Analysis results would help to find out defects and improve the yield by introducing right analysis method of FIB/EMMI tools in display panels.
Keywords :
display devices; organic light emitting diodes; reliability; silicon; thin film transistors; EMMI tool; FIB; LTPS TFT; OLED; display panel; failure analysis; latent damage; leakage path; line defect; low temperature poly-silicon TFT; optical microscope; Electrostatic discharges; Failure analysis; Lighting; Logic gates; Microscopy; Organic light emitting diodes; Transistors;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2012 19th IEEE International Symposium on the
Conference_Location :
Singapore
Print_ISBN :
978-1-4673-0980-6
DOI :
10.1109/IPFA.2012.6306314
