Title :
Preparation of thin films by ablation with anaconda ion beam generator
Author :
Yatsui, K. ; Jiang, Wei ; Davis, H.A. ; Olson, J.C. ; Waganaar, W.J. ; Rej, D.
Author_Institution :
Laboratory of Beam Technology, Nagaoka University of Technology, Niigata 940-21, Japan
Abstract :
Thin films of silicon carbide are produced by using the technology of ion beam evaporation. Various analytical methods are used to analyze film thickness, film composition and crystallizability for samples obtained with different target-substrate distances.
Conference_Titel :
High-Power Particle Beams, 1996 11th International Conference on
Conference_Location :
Prague, Czech Republic
Print_ISBN :
978-80-902250-3-9
