DocumentCode
572739
Title
Study of YBCO thin films deposited by intense pulsed light ion beam evaporation
Author
Grigoriu, Constantin ; Chamdani, E.P.Achmad ; Miu, Dana ; Masugata, Katsumi ; Yatsui, Kiyoshi
Author_Institution
Laboratory of Beam Technology, Nagaoka University of Technology, Niigata 9-10-21, Japan
Volume
2
fYear
1996
fDate
10-14 June 1996
Firstpage
898
Lastpage
901
Abstract
The present report describes deposition of YBa2 Cu3 O7−x (YBCO) thin films by intense pulsed ion beam evaporation (IBE). Standard deposition configuration (front side deposition, IBE/FS), is compared with a new proposed one, back side deposition (IBE/BS). This method has proven valuable for improving the film morphologies and stoichiometry.
fLanguage
English
Publisher
iet
Conference_Titel
High-Power Particle Beams, 1996 11th International Conference on
Conference_Location
Prague, Czech Republic
Print_ISBN
978-80-902250-3-9
Type
conf
Filename
6308482
Link To Document