• DocumentCode
    572739
  • Title

    Study of YBCO thin films deposited by intense pulsed light ion beam evaporation

  • Author

    Grigoriu, Constantin ; Chamdani, E.P.Achmad ; Miu, Dana ; Masugata, Katsumi ; Yatsui, Kiyoshi

  • Author_Institution
    Laboratory of Beam Technology, Nagaoka University of Technology, Niigata 9-10-21, Japan
  • Volume
    2
  • fYear
    1996
  • fDate
    10-14 June 1996
  • Firstpage
    898
  • Lastpage
    901
  • Abstract
    The present report describes deposition of YBa2Cu3O7−x (YBCO) thin films by intense pulsed ion beam evaporation (IBE). Standard deposition configuration (front side deposition, IBE/FS), is compared with a new proposed one, back side deposition (IBE/BS). This method has proven valuable for improving the film morphologies and stoichiometry.
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    High-Power Particle Beams, 1996 11th International Conference on
  • Conference_Location
    Prague, Czech Republic
  • Print_ISBN
    978-80-902250-3-9
  • Type

    conf

  • Filename
    6308482