Title :
Next-generation wafer stage motion control: Connecting system identification and robust control
Author :
Oomen, Tom ; van Herpen, Robbert ; Quist, S. ; van de Wal, Marc ; Bosgra, Okko ; Steinbuch, Maarten
Author_Institution :
Eindhoven Univ. of Technol., Eindhoven, Netherlands
Abstract :
Next-generation precision motion systems are lightweight to meet stringent requirements regarding throughput and accuracy. Such lightweight systems typically exhibit lightly damped flexible dynamics in the controller cross-over region. State-of-the-art modeling and motion control design procedures do not deliver the required model fidelity to control the flexible dynamical behavior. In this paper, identification and control challenges are investigated and a novel approach for next-generation motion control is presented. The procedure is applied to a multivariable wafer stage, confirming a significant performance improvement.
Keywords :
identification; integrated circuit manufacture; mass production; motion control; multivariable control systems; process control; robust control; semiconductor technology; controller cross-over region; integrated circuits; lightly damped flexible dynamics; mass production; multivariable wafer stage; next-generation precision motion systems; next-generation wafer stage motion control; robust control; system identification; Computational modeling; Motion control; Next generation networking; Robust control; Robustness; Semiconductor device modeling; Uncertainty;
Conference_Titel :
American Control Conference (ACC), 2012
Conference_Location :
Montreal, QC
Print_ISBN :
978-1-4577-1095-7
Electronic_ISBN :
0743-1619
DOI :
10.1109/ACC.2012.6314685
