Data-based control tuning in master-slave systems

For improved output synchronization in master-slave systems, a data-based control tuning is presented. Herein the coefficients of two finite-duration impulse response (FIR) filters are found through machine-in-the-loop optimization. One filter is used to shape the input to the slave system while the other filter is used as feedforward controller. With this two-filter structure we circumvent the problem of being limited either by model uncertainty in approximating the inverse plant dynamics or by closed-loop bandwidth constraints of the slave system. The optimized controller induces machine-specific (improved) output synchronization. This is demonstrated on the high-precision motion systems of an industrial wafer scanner.