Title :
Manufacturing of regular microstructures by methods of LIGA — Technologies
Author :
Aumalikova, M.N. ; Timchenko, N. -É ; Kuznetsov, S.I. ; Goldenberg, B.G. ; Pindurin, V.F. ; Litvin, S.V. ; Kanaev, V.G.
Author_Institution :
Tomsk Polytechnic University, Tomsk, Russia
Abstract :
The results of the work on the creation of regular microstructures using deep x-ray lithography with synchrotron radiation are presented. The characteristics of the main processes of supporting membranes formation, absorbing layers and topological templates, as well as the results of measurements of the resulting structures when exposed to the channel of synchrotron radiation are presented.
Keywords :
LIGA; crystal microstructure; membranes; synchrotron radiation; LIGA technology; absorbing layers; deep x-ray lithography; membranes formation; regular microstructure manufacturing; synchrotron radiation; topological templates; Biomembranes; Etching; Gold; Resists; Silicon; Silicon compounds; LIGA-technology; deep x-ray lithography; regular microstructures;
Conference_Titel :
Strategic Technology (IFOST), 2012 7th International Forum on
Conference_Location :
Tomsk
Print_ISBN :
978-1-4673-1772-6
DOI :
10.1109/IFOST.2012.6357553
