DocumentCode
577525
Title
The control system of industrial plant for large reflectors ion-plasma coating
Author
Paschenko, Oleg ; Soloviev, Alexander ; Yudakov, Sergey
Author_Institution
National Research Tomsk Polytechnic University, Tomsk Russia
fYear
2012
fDate
18-21 Sept. 2012
Firstpage
1
Lastpage
5
Abstract
The control system of industrial plant for ion-plasma treatment of large reflectors is presented in the report. Brief description of the structure and technological capabilities of the plant is given. The selection of structure of the control system and master controller is justified. The principles of the controller executive program are described. Design features of the control system are given.
Keywords
coating techniques; industrial control; industrial plants; plasma deposition; reflector antennas; control system; controller executive program; industrial plant; ion-plasma deposition; ion-plasma treatment; large reflector ion-plasma coating; master controller; multilayer radio-reflective coating; Coatings; Heating; Ion sources; Magnetrons; Vacuum systems; Valves; Control system; controller XPAC; reflector;
fLanguage
English
Publisher
ieee
Conference_Titel
Strategic Technology (IFOST), 2012 7th International Forum on
Conference_Location
Tomsk
Print_ISBN
978-1-4673-1772-6
Type
conf
DOI
10.1109/IFOST.2012.6357781
Filename
6357781
Link To Document