Title :
Electro-thermal tuning of athermal 850nm VCSELs with thermally actuated T-shape membrane structure
Author :
Sano, Hayato ; Nakata, Norihiko ; Nakahama, Masanori ; Matsutani, Akihiro ; Koyama, Fumio
Author_Institution :
Photonics Integration Syst. Res. Center, Tokyo Inst. of Technol., Yokohama, Japan
Abstract :
We demonstrate the athermal operation and the wavelength tuning of 850nm-GaAs-VCSELs using thermally actuated MEMS structure at the same time. A small temperature dependence of -0.011 nm/K and wavelength tuning of 4 nm was obtained.
Keywords :
III-V semiconductors; gallium arsenide; laser cavity resonators; laser tuning; membranes; micro-optomechanical devices; semiconductor lasers; surface emitting lasers; GaAs; athermal VCSEL; athermal operation; electro-thermal tuning; temperature dependence; thermally actuated MEMS structure; thermally actuated T-shape membrane structure; vertical cavity surface emitting lasers; wavelength 4 nm; wavelength 850 nm; wavelength tuning; Distributed Bragg reflectors; Gallium arsenide; Lasers; Micromechanical devices; Periodic structures; Photonics;
Conference_Titel :
Photonics Conference (IPC), 2012 IEEE
Conference_Location :
Burlingame, CA
Print_ISBN :
978-1-4577-0731-5
DOI :
10.1109/IPCon.2012.6358585