Title :
Double-layer silicon photonic crystal fiber tip temperature sensor
Author :
Park, Bryan ; Jung, Il Woong ; Provine, J. ; Howe, Roger T. ; Solgaard, Olav
Author_Institution :
Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA
Abstract :
We describe the fabrication of a double-layer silicon photonic crystal using self-aligned CMOS-compatible processes and its assembly on a single mode fiber using a wafer template and epoxy bonding. The fiber sensor has sharper resonances and higher temperature sensitivity than the previously-reported single-layer sensor. The new assembly method facilitates batch-production of the sensor and allows for extension to high temperature measurement.
Keywords :
elemental semiconductors; fibre optic sensors; holey fibres; optical fabrication; photonic crystals; silicon; temperature sensors; Si; double-layer silicon photonic crystal fiber tip temperature sensor; epoxy bonding; higher-temperature sensitivity; optical fabrication; self-aligned CMOS-compatible processes; single-mode fiber assembly; wafer template; Optical fiber couplers; Optical fiber sensors; Sensitivity; Silicon; Temperature measurement; Temperature sensors; GOPHER; double-layer photonic crystal; fiber sensor; temperature sensing; template-assisted epoxy bonding;
Conference_Titel :
Photonics Conference (IPC), 2012 IEEE
Conference_Location :
Burlingame, CA
Print_ISBN :
978-1-4577-0731-5
DOI :
10.1109/IPCon.2012.6358738
