DocumentCode
579526
Title
Electroless nickel plating on fluoroplastics films using atmospheric pressure nonthermal plasma graft polymerization process
Author
Kuroki, Tomoyuki ; Tahara, Mitsuru ; Kuwahara, Takuya ; Okubo, Masaaki
Author_Institution
Osaka Prefecture Univ., Sakai, Japan
fYear
2012
fDate
7-11 Oct. 2012
Firstpage
1
Lastpage
6
Abstract
Electroless nickel plating and photolithography on a fluoroplastics film, which is treated by atmospheric pressure nonthermal plasma graft polymerization, is investigated. Fluoroplastics such as PFA (perfluoroalkoxy fluoroplastics) and PTFE (polytetrafluoroethylene) are extremely stable, inactive, and hydrophobic. Therefore, it is difficult to apply them to electric circuits without surface treatment. In this study, a low-environmental load surface modification of a PTFE film using an atmospheric nonthermal plasma graft polymerization device that can treat A4-size sample is performed. In addition, electroless nickel plating and photolithography on the treated PTFE film are achieved successfully.
Keywords
electroless deposition; nickel; photolithography; polymer films; polymerisation; Ni; PFA; PTFE film; atmospheric pressure nonthermal plasma graft polymerization process; electroless nickel plating; fluoroplastics films; hydrophobic; perfluoroalkoxy fluoroplastics; photolithography; polytetrafluoroethylene; Films; Lithography; Photolithography; Plasmas; Polymers; Surface morphology; Surface treatment; Electroless nickel plating; Fluoroplastics films; Graft polymerization; Nonthermal plasma; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Industry Applications Society Annual Meeting (IAS), 2012 IEEE
Conference_Location
Las Vegas, NV
ISSN
0197-2618
Print_ISBN
978-1-4673-0330-9
Electronic_ISBN
0197-2618
Type
conf
DOI
10.1109/IAS.2012.6373982
Filename
6373982
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