A Novel MEMS Fractal Inductor Based on Hilbert Curve

Author

Wang, Gang ; Xu, Lixin ; Wang, Ting

Author_Institution

Sch. of Mechatron., Beijing Inst. of Technol., Beijing, China

fYear

2012

fDate

3-5 Nov. 2012

Firstpage

241

Lastpage

244

Abstract

Being critical component in high performance, MMIC On-chip inductor plays an important role in modern microwave communication facilities. A novel MEMS fractal inductor based on Hilbert curve is presented. By using MEMS technique, inductor is fabricated on silicon substrate with geometry of fractal Hilbert curve pattern. The back side of substrate is etched to generate suspended thin film structure. The fabrication technique is compatible with CMOS process. Compared with planer spiral and winding form inductor, the inductance of MEMS fractal inductor improved more than 50%. The MEMS fractal inductor can be integrated with MMIC chip and satisfy the demand for modern RF communication devices.

Keywords

Hilbert transforms; inductors; micromechanical devices; CMOS process; MEMS fractal inductor; MEMS technique; MMIC chip; MMIC on-chip inductor; fabrication technique; fractal Hilbert curve pattern; modern RF communication devices; modern microwave communication facilities; planer spiral; silicon substrate; thin film structure; winding form inductor; Fractals; Inductance; Inductors; MMICs; Micromechanical devices; Spirals; Substrates; Hilbert curve; MEMS; fractal; inductor;

fLanguage

English

Publisher

ieee

Conference_Titel

Computational Intelligence and Communication Networks (CICN), 2012 Fourth International Conference on

Conference_Location

Mathura

Print_ISBN

978-1-4673-2981-1

Type

conf

DOI

10.1109/CICN.2012.31

Filename

6375109