Sliding mode predictive control of PSS parallel micro-stage

I n this paper a whole closed loop position feedback system is designed for a 3-axies parallel micro-stage to compensate the axis coupling error influence. By predicting the future sliding mode function value and combining feedback correction and receding horizon optimization approaches, a discrete-time sliding mode control law for tracking problem is constructed. With the designed control law, closed-loop systems have strong robustness to matched or unmatched uncertainties. Numerical simulations illustrate the validity of the proposed algorithm.