Vibration simulation of hybrid type substrate handling robot in the vacuum environment

Nowadays, automation system using robot is very important to increase productivity in mass production system. Especially, solar cell manufacturing line is composed of many types of robots such as cassette robot and several glass handling robots for high productivity. Because solar cell substrate is three to five times heavier than LCD glass substrate, handling a heavy substrate is the main issue in the solar cell manufacturing process. Therefore, position precision, transfer speed and vibration control of glass are the main issues. In the paper, hybrid type substrate handling robot used in the vacuum environment is introduced and its performance is analyzed.