Identification of flexible mode and motion simulation for beam type solar cell substrate transport robot

A beam type solar cell substrate transport robot is under development to meet the high demand to increase the productivity of solar cell. In order to reduce the tact time and increase the productivity, the accurate position control with vibration rejection technique becomes more important as the size of solar cell substrate becomes larger. This paper is focusing on the beam type substrate handling robot. The flexible modes of the beam in the fork are predicted by FE analysis and they are verified by the experiment using impact test. After constructing the simulation model including flexible mode, the motion simulation is conducted by using MATLAB/Simulink. The vibration due to the flexible mode during the motion is predicted, and the vibration attenuation after applying input shaping is evaluated. The motion simulation results which input shaping is applied show that the vibration due to the flexible mode could be noticeably attenuated.