Title :
Electro-thermal characterization of a differential temperature sensor and the thermal coupling in a 65nm CMOS IC
Author :
Altet, Josep ; Gonzalez, J.L. ; Gomez, David ; Perpina, Xavier ; Grauby, Stephane ; Dufis, C. ; Vellvehi, Miquel ; Mateo, D. ; Dilhaire, S. ; Jorda, Xavier
Author_Institution :
Electron. Eng. Dept., Univ. Politec. de Catalunya, Barcelona, Spain
Abstract :
This paper explains the design decisions and the different measurements we have done in order to characterize the thermal coupling and the characteristics of temperature sensors embedded in a integrated circuit implemented in a CMOS 65nm technology. The circuit contains a 2GHz linear power amplifier, MOS transistors behaving as heat sources and two differential temperature sensors. Temperature measurements performed with the embedded sensor are corroborated with an Infra-Red camera and a laser interferometer used as thermometer.
Keywords :
CMOS integrated circuits; cameras; infrared imaging; integrated circuit measurement; intelligent sensors; light interferometers; power MOSFET; power amplifiers; temperature measurement; temperature sensors; thermometers; CMOS IC technology; MOS transistor; differential temperature sensor; electrothermal characterization; embedded sensor; frequency 2 GHz; heat source; infrared camera; laser interferometer; linear power amplifier; size 65 nm; temperature measurement; thermal coupling; thermometer; Frequency measurement; Heating; Sensitivity; Temperature measurement; Temperature sensors; Transducers; Voltage measurement;
Conference_Titel :
Thermal Investigations of ICs and Systems (THERMINIC), 2012 18th International Workshop on
Conference_Location :
Budapest
Print_ISBN :
978-1-4673-1882-2
