Accuracy of triangulation method sensor with optical skid

To measure a profile on a machine accurately, it is necessary to remove influences caused by various disturbances such as vibration. Vibration between a workpiece and a sensor causes measurement error on machine measurements. Therefore, the authors proposed a sensor using triangulation with an optical skid to remove vibration error. It showed effectiveness against vibration. When the skid probe diameter is not much larger than the wavelength of the profile, the amplitude of the measured profile is smaller than the actual amplitude. This report presents reconstruction method for use with the profile surface of a workpiece with the optical skid sensor and describes effects obtained by simulations and experiments using reconstruction method.