Title :
Atomic-plane-thick reconstruction across the interface during heteroepitaxial bonding of InP-clad quantum wells to Si
Author :
Talneau, A. ; Roblin, Christophe ; Itawi, A. ; Mauguin, O. ; Largeau, Ludovic ; Beaudouin, G. ; Sagnes, I. ; Patriarche, G.
Author_Institution :
Lab. de Photonique et de Nanostruct., Marcoussis, France
Abstract :
Monolithic integration of InP-based materials on Si will allow lasers as well as optical amplifiers operating at 1.55μm to be efficiently included in photonic integrated circuits. We demonstrate here oxide-free heteroepitaxial bonding of InP-clad GaInAs quantum wells to Si, with an atomic-plane-thick reconstruction across the InP-Si interface. The wells photoluminescence emitted-wavelength demonstrates no shift after bonding. Several InP surface activation procedures have been investigated. This bonding approach is compatible with guiding designs including a nanostructuration, thus enabling specific designs associated to desirable optical functions.
Keywords :
III-V semiconductors; bonding processes; cladding techniques; claddings; elemental semiconductors; gallium arsenide; indium compounds; photoluminescence; semiconductor quantum wells; silicon; surface reconstruction; surface treatment; InP surface activation procedures; InP-Si interface; InP-based materials; InP-clad GaInAs quantum wells; Si-InP-GaInAs; atomic-plane-thick reconstruction; bonding approach; lasers; monolithic integration; nanostructuration; optical amplifiers; optical functions; oxide-free heteroepitaxial bonding; photonic integrated circuits; wavelength 1.55 mum; well photoluminescence emitted-wavelength; Atom optics; Bonding; Optical surface waves; Photonics; Pollution measurement; Quantum wells; Surface waves; III–V integration on Si; heteroepitaxial bonding; interface TEM analysis; photonic integrated circuits; surface reconstruction;
Conference_Titel :
Indium Phosphide and Related Materials (IPRM), 2012 International Conference on
Conference_Location :
Santa Barbara, CA
Print_ISBN :
978-1-4673-1725-2
DOI :
10.1109/ICIPRM.2012.6403338