• DocumentCode
    587828
  • Title

    Atomic-plane-thick reconstruction across the interface during heteroepitaxial bonding of InP-clad quantum wells to Si

  • Author

    Talneau, A. ; Roblin, Christophe ; Itawi, A. ; Mauguin, O. ; Largeau, Ludovic ; Beaudouin, G. ; Sagnes, I. ; Patriarche, G.

  • Author_Institution
    Lab. de Photonique et de Nanostruct., Marcoussis, France
  • fYear
    2012
  • fDate
    27-30 Aug. 2012
  • Firstpage
    130
  • Lastpage
    132
  • Abstract
    Monolithic integration of InP-based materials on Si will allow lasers as well as optical amplifiers operating at 1.55μm to be efficiently included in photonic integrated circuits. We demonstrate here oxide-free heteroepitaxial bonding of InP-clad GaInAs quantum wells to Si, with an atomic-plane-thick reconstruction across the InP-Si interface. The wells photoluminescence emitted-wavelength demonstrates no shift after bonding. Several InP surface activation procedures have been investigated. This bonding approach is compatible with guiding designs including a nanostructuration, thus enabling specific designs associated to desirable optical functions.
  • Keywords
    III-V semiconductors; bonding processes; cladding techniques; claddings; elemental semiconductors; gallium arsenide; indium compounds; photoluminescence; semiconductor quantum wells; silicon; surface reconstruction; surface treatment; InP surface activation procedures; InP-Si interface; InP-based materials; InP-clad GaInAs quantum wells; Si-InP-GaInAs; atomic-plane-thick reconstruction; bonding approach; lasers; monolithic integration; nanostructuration; optical amplifiers; optical functions; oxide-free heteroepitaxial bonding; photonic integrated circuits; wavelength 1.55 mum; well photoluminescence emitted-wavelength; Atom optics; Bonding; Optical surface waves; Photonics; Pollution measurement; Quantum wells; Surface waves; III–V integration on Si; heteroepitaxial bonding; interface TEM analysis; photonic integrated circuits; surface reconstruction;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Indium Phosphide and Related Materials (IPRM), 2012 International Conference on
  • Conference_Location
    Santa Barbara, CA
  • ISSN
    1092-8669
  • Print_ISBN
    978-1-4673-1725-2
  • Type

    conf

  • DOI
    10.1109/ICIPRM.2012.6403338
  • Filename
    6403338