Title :
Group IV TFETs for very low power applications
Author :
Hsu-Yu Chang ; Woo, J.C.S.
Author_Institution :
Dept. of Electr. Eng., UCLA, Los Angeles, CA, USA
Abstract :
Novel source pocket Si Tunnel field effect transistor (TFET) is successfully fabricated by laser annealing. It shows reduced threshold voltage, steep subthreshold swing (46mV/dec), excellent ION/IOFF ratio (>;107) and improved output characteristics due to dramatic reduction of tunneling resistance.
Keywords :
field effect transistors; laser beam annealing; low-power electronics; silicon; tunnel transistors; Si; group IV TFET; laser annealing; output characteristics; source pocket silicon tunnel field effect transistor; tunneling resistance reduction; very low power application; Annealing; Lasers; Tunneling;
Conference_Titel :
Subthreshold Microelectronics Conference (SubVT), 2012 IEEE
Conference_Location :
Waltham, MA
Print_ISBN :
978-1-4673-1586-9
DOI :
10.1109/SubVT.2012.6404326