DocumentCode
588135
Title
Group IV TFETs for very low power applications
Author
Hsu-Yu Chang ; Woo, J.C.S.
Author_Institution
Dept. of Electr. Eng., UCLA, Los Angeles, CA, USA
fYear
2012
fDate
9-10 Oct. 2012
Firstpage
1
Lastpage
1
Abstract
Novel source pocket Si Tunnel field effect transistor (TFET) is successfully fabricated by laser annealing. It shows reduced threshold voltage, steep subthreshold swing (46mV/dec), excellent ION/IOFF ratio (>;107) and improved output characteristics due to dramatic reduction of tunneling resistance.
Keywords
field effect transistors; laser beam annealing; low-power electronics; silicon; tunnel transistors; Si; group IV TFET; laser annealing; output characteristics; source pocket silicon tunnel field effect transistor; tunneling resistance reduction; very low power application; Annealing; Lasers; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Subthreshold Microelectronics Conference (SubVT), 2012 IEEE
Conference_Location
Waltham, MA
Print_ISBN
978-1-4673-1586-9
Type
conf
DOI
10.1109/SubVT.2012.6404326
Filename
6404326
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