Title :
Translational actuator for precision positioning with high speed motion
Author :
Mori, Shinsuke ; Sakurada, A. ; Naganawa, A. ; Shibuya, Yuki ; Obinata, G.
Author_Institution :
AIT (Akita Ind. Technol. center), Akita, Japan
fDate :
Oct. 31 2012-Nov. 2 2012
Abstract :
Precision positioning actuators with high speed motion are demanded in the field of manufacturing inspections for semiconductor and flat display areas, and so on. The authors called “Nano-Motion Actuator (NMA)” which consisted of a displacement-amplifying mechanism and a stacked piezoelectric element [1]. However, its first resonance frequency became limited by displacement amplification. We proposed a new actuator mechanism that is applied translation mechanism for the scanning probe microscope (SPM), and so on.
Keywords :
piezoelectric actuators; scanning probe microscopy; displacement amplification; displacement-amplifying mechanism; flat display areas; high speed motion; nano-motion actuator; piezoelectric element; precision positioning actuators; scanning probe microscope; semiconductor areas; translational actuator; Actuators; Electronic mail; Finite element methods; Frequency control; Frequency measurement; Microscopy; Resonant frequency; actuator; elastic hinge; scanning probe microscope (SPM); stage; staked piezoelectric element; translation mechanism;
Conference_Titel :
APMRC, 2012 Digest
Conference_Location :
Singapore
Print_ISBN :
978-1-4673-4734-1
