Title :
Piezoelectric ZnO thin films for contact sensing and head actuation
Author :
Yuan, Yuan ; Chow, K.S. ; Du, Honglei ; Xia, Xiang-Gen ; Zhang, M. ; Yu, Son-Cheol ; Liu, B.
Author_Institution :
Sch. of Mech. & Aerosp. Eng., Nanyang Technol. Univ., Singapore, Singapore
fDate :
Oct. 31 2012-Nov. 2 2012
Abstract :
This paper presents deposition and characterization of zinc oxide (ZnO) thin films for smart sliders. ZnO thin films with two different c-axis orientations were prepared using RF magnetron sputtering. A piezoelectric ZnO sensor array was fabricated using fabrication techniques compatible with standard slider micromachining process.
Keywords :
micromachining; piezoelectric thin films; piezoelectric transducers; sensor arrays; sputter deposition; zinc compounds; RF magnetron sputtering; ZnO; contact sensing; deposition; fabrication technique; head actuation; piezoelectric sensor array; piezoelectric thin film; smart slider; standard slider micromachining process; Arrays; Fabrication; Films; Micromachining; Substrates; Zinc oxide; ZnO; contact sensing; head actuation; thin film;
Conference_Titel :
APMRC, 2012 Digest
Conference_Location :
Singapore
Print_ISBN :
978-1-4673-4734-1
