Highly (001)-oriented thin continuous L10 FePt films for bit patterned media

Author

Jung-Wei Liao ; Chung-Fu Cheng ; Ding-Shuo Wang ; Kuo-Feng Huang ; Liang-Wei Wang ; Chih-Huang Lai

fYear

2012

fDate

Oct. 31 2012-Nov. 2 2012

Firstpage

1

Lastpage

2

Abstract

We demonstrate a highly (001)-oriented thin continuous FePt film by introducing an FeO_x cap layer. The agglomeration in capped FePt films is significantly suppressed by inhibiting the surface diffusion, which then yields a desired continuous film with a narrowed (001) out-of-plane angular distribution. Through the promoted interdiffusion of Fe and Pt by the reduction of Fe oxides during annealing, we successfully maintain a (001) L1₀ phase while suppressing the agglomeration in FePt films. By utilizing this continuous FePt film and template of diblock copolymer, we obtain FePt dot arrays with an average dot diameter of 25 nm.

Keywords

annealing; chemical interdiffusion; metallic thin films; reduction (chemical); surface diffusion; FeO_x cap layer; FePt; FePt dot array diameter; FePt film agglomeration; annealing; bit patterned media; diblock copolymer template; highly (001)-oriented thin continuous L1₀ FePt films; interdiffusion; narrowed (001) out-of-plane angular distribution; oxide reduction; surface diffusion; Annealing; Iron; Magnetic films; Media; L10 FePt; agglomeration; bit patterned media; ordering;

fLanguage

English

Publisher

ieee

Conference_Titel

APMRC, 2012 Digest

Conference_Location

Singapore

Print_ISBN

978-1-4673-4734-1

Type

conf

Filename

6407787