A differential electrometer based on coupled microresonators

This paper introduces a micromachined electrometer with high resolution and wide dynamic range. The sensor is made of electrically coupled microresonators. The input signal modifies the coupling strength between the microresonators, and hence, results in a change in the location of system poles. Additionally, using opposite polarities for the bias voltages of the resonators leads to moving of the resonance frequencies away from each other. This produces a differential signal with high sensitivity compared to devices made from a single resonator. In addition to the high sensitivity, another advantage of this sensor is its robustness against manufacturing tolerances and interfering parameters such as temperature variations.