Design and fabrication of micromachined LPD-based SnO2 gas sensor integrated TaN with micro-hotplate

In this study, the design and fabrication of a micromachined LPD-based SnO₂ gas sensor integrated with TaN micro-hotplate was carried out by utilizing MEMS technology. In the characteristics of the micro-heater, thermal response, thermal distribution and power consumption of heated TaN micro-heater were measured by FLIR systems. For the sensing characterization, the sensing responses of LPD-based SnO₂ gas sensor with TaN micro-heater to H₂S gas were measured in different operating temperatures. In sensing properties, the resistances of the gas sensor significantly change in the staircase concentration of H₂S gas and which optimal operating temperature was 250°C.