Title :
MEMS for TPMS and exhaust of automobiles
Author :
Chun, K. ; Kim, H.C. ; Kim, Sungho ; Kim, Youngjae ; Lee, Sang-Rim ; Min, Kyoungdoug ; Lim, Sharon ; Lee, Jeyull
Author_Institution :
Dept. of ECE, Seoul Nat. Univ., Seoul, South Korea
Abstract :
In this paper, MEMS devices for TPMS and exhaust monitoring of automobiles are investigated. To counteract to EURO6 regulation, particulate matter sensor for detecting DPF failure of diesel engine as well as accelerometers for calibrating centrifugal effect on pressure measurement and secondary energy harvesting device will have strong effect for car safety. Heater embedded PM sensor uses electro dynamic principle and achieves resolution of 0.25mg/km. The accelerometer for TPMS application focuses on simplicity and low cost using piezoresistive beams and anodic bonding. Electrostatic energy harvester uses only 3 masks and shows symmetrical output of up to 0.73uW/cm3.
Keywords :
accelerometers; diesel engines; microsensors; DPF failure; EURO6 regulation; MEMS; TPMS; anodic bonding; automobiles; centrifugal effect; diesel engine; electro dynamic principle; electrostatic energy harvester; embedded PM sensor; exhaust monitoring; particulate matter sensor; piezoresistive beams; pressure measurement; secondary energy harvesting device; Accelerometers; Atmospheric measurements; Diesel engines; Micromechanical devices; Monitoring; Safety; Vibrations;
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2012.6411559
