MEMS for TPMS and exhaust of automobiles

Author

Chun, K. ; Kim, H.C. ; Kim, Sungho ; Kim, Youngjae ; Lee, Sang-Rim ; Min, Kyoungdoug ; Lim, Sharon ; Lee, Jeyull

Author_Institution

Dept. of ECE, Seoul Nat. Univ., Seoul, South Korea

fYear

2012

fDate

28-31 Oct. 2012

Firstpage

1

Lastpage

4

Abstract

In this paper, MEMS devices for TPMS and exhaust monitoring of automobiles are investigated. To counteract to EURO6 regulation, particulate matter sensor for detecting DPF failure of diesel engine as well as accelerometers for calibrating centrifugal effect on pressure measurement and secondary energy harvesting device will have strong effect for car safety. Heater embedded PM sensor uses electro dynamic principle and achieves resolution of 0.25mg/km. The accelerometer for TPMS application focuses on simplicity and low cost using piezoresistive beams and anodic bonding. Electrostatic energy harvester uses only 3 masks and shows symmetrical output of up to 0.73uW/cm³.

Keywords

accelerometers; diesel engines; microsensors; DPF failure; EURO6 regulation; MEMS; TPMS; anodic bonding; automobiles; centrifugal effect; diesel engine; electro dynamic principle; electrostatic energy harvester; embedded PM sensor; exhaust monitoring; particulate matter sensor; piezoresistive beams; pressure measurement; secondary energy harvesting device; Accelerometers; Atmospheric measurements; Diesel engines; Micromechanical devices; Monitoring; Safety; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2012 IEEE

Conference_Location

Taipei

ISSN

1930-0395

Print_ISBN

978-1-4577-1766-6

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2012.6411559

Filename

6411559