Simulation Analysis of a Symmetrical Micromachined Vibratory Rate Gyroscope

A symmetrical micromachined vibratory rate gyroscope has been proposed in this paper. The geometrical structure model has been established by 3D model software. Through analyzing the geometrical structure of the micromachined gyroscope, the basic parameters which affect the performance of the microgyroscope sharply have been obtained. Taking advantage of the finite element analysis software ANSYS, the designed model is imported into the analysis bench, meshed reasonably, added the proper constraints. The solution is acquired after some calculation time. By altering the geometrical parameters of the microgyroscope model, the influence factors of the resonant frequency of the microgyroscope have been founded one by one. The related data curves have been obtained automatically, which provides the theoretical basis for the specific structure design of the microgyroscope.