DocumentCode
594124
Title
Silicon avalanche photodiode array fabrication for imaging application
Author
Chee-Wei Tok ; Ning Duan ; Fei Sun ; Guo-Qiang Lo
Author_Institution
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
fYear
2012
fDate
13-16 Dec. 2012
Firstpage
1
Lastpage
3
Abstract
This paper demonstrates the fabrication of silicon APD array for clinical imaging applications. The fabrication process is compatible with CMOS platform. The measurement results show they are able to achieve low dark current (before breakdown) and operate linearly after breakdown (Geiger mode). Further improvement will be implemented in design and fabrication to improve the leakage current.
Keywords
avalanche photodiodes; elemental semiconductors; optical arrays; optical design techniques; optical fabrication; photomultipliers; silicon; CMOS platform; Geiger mode; Si; clinical imaging application; leakage current; low dark current; optical design; silicon avalanche photodiode array fabrication; silicon photomultiplier; Arrays; Imaging; Lasers; Photonics;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics Global Conference (PGC), 2012
Conference_Location
Singapore
Print_ISBN
978-1-4673-2513-4
Type
conf
DOI
10.1109/PGC.2012.6458011
Filename
6458011
Link To Document