Silicon microring resonator sensors for the detection of volatile organic compounds

Author

Dongliang Fu ; Qing Liu ; Kee, J.S. ; Mi Kyoung Park

Author_Institution

Bioelectronics Program, A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore

fYear

2012

fDate

13-16 Dec. 2012

Firstpage

1

Lastpage

3

Abstract

We demonstrate a volatile organic compounds (VOC) gas detection using silicon based microring resonator devices. Polymer is chemically attached to sidewall of silicon waveguide and microring as a cladding layer. Absorption of VOC gases into the polymer film induces a resonance wavelength shift. A detection limit of 10 part per million (ppm) for both toluene and acetone has been achieved.

Keywords

claddings; elemental semiconductors; gas sensors; micro-optomechanical devices; microcavities; micromechanical resonators; microsensors; optical resonators; optical waveguides; polymer films; silicon; Si; VOC gas absorption; acetone; cladding layer; detection limit; polymer film; resonance wavelength shift; silicon microring resonator sensors; silicon waveguide sidewall; toluene; volatile organic compound gas detection; Annealing; CMOS integrated circuits; Couplings; Plasma temperature; Temperature sensors; Silicon microring resonator; VOC detection; gas sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Photonics Global Conference (PGC), 2012

Conference_Location

Singapore

Print_ISBN

978-1-4673-2513-4

Type

conf

DOI

10.1109/PGC.2012.6458030

Filename

6458030