Title :
A new RF MEMS technology enabling tunability for RF front-end RF ohmic relay based on a flexible anchorless membrane
Author_Institution :
Delf MEMS Co., Villeneuve-d´´Ascq, France
fDate :
Oct. 29 2012-Nov. 1 2012
Abstract :
This paper presents a new RF MEMS relay dedicated to mobile applications. The challenges, the MEMS technology & the packaging solution are introduced.
Keywords :
electronics packaging; micromechanical devices; relays; RF MEMS relay; RF MEMS technology; RF front-end RF ohmic relay; flexible anchorless membrane; packaging solution; Force; Micromechanical devices; Mobile handsets; Packaging; Radio frequency; Relays; Switches;
Conference_Titel :
Microwave Conference (EuMC), 2012 42nd European
Conference_Location :
Amsterdam
Print_ISBN :
978-1-4673-2215-7
Electronic_ISBN :
978-2-87487-026-2
