DocumentCode
59459
Title
Optical Emission Spectroscopy of H
, H
, and H
Author
Torres, Juana ; Reyes, Pedro Guillermo ; Torres, Cesar ; Martinez, Horacio ; Vergara, Josefina
Author_Institution
Fac. de Cienc., Univ. Autonoma del Estado de Mexico, Toluca, Mexico
Volume
43
Issue
3
fYear
2015
fDate
Mar-15
Firstpage
846
Lastpage
850
Abstract
In this paper, the addition of Ar to H2 is experimentally investigated. This paper primarily aims to observe the effects that this addition has on the intensity of hydrogen emission lines in a glow discharge mixture. The total pressure was 3 torr, at a power level of 3.9 W. Optical emission spectroscopy was used for plasma characterization, and the principal species observed were Hγ (434 nm), Hβ (486.1 nm), Hα (656.3 nm), and H2 (603.1 nm), and Ar I (750.5 nm), Ar I (763.5 nm), and Ar I (811.6 nm). The electron temperature and ion density were determined by a double Langmuir probe. The electron temperature was found to be in the range of 2.5-6.5 eV, and the ion concentration was on the order of 109 cm-3.
Keywords
Langmuir probes; argon; gas mixtures; glow discharges; hydrogen; ion density; plasma density; plasma temperature; Ar I; Ar-H2; Hα; Hβ; Hγ; double Langmuir probe; electron temperature; electron volt energy 2.5 eV to 6.5 eV; glow discharge mixture; hydrogen emission line intensity; ion concentration; ion density; optical emission spectroscopy; plasma characterization; power 3.9 W; pressure 3 torr; wavelength 434 nm; wavelength 486.1 nm; wavelength 603.1 nm; wavelength 656.3 nm; wavelength 750.5 nm; wavelength 763.5 nm; wavelength 811.6 nm; Argon; Discharges (electric); Glow discharges; Plasma temperature; Probes; Spectroscopy; Balmer lines; glow discharge; low pressure plasma; low temperature plasma; optical emission spectroscopy (OES) of cold plasma; optical emission spectroscopy (OES) of cold plasma.;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2015.2395141
Filename
7036068
Link To Document