Title :
Reflective displacement sensors with monolithically integrated VCSELs and RCEPDs
Author :
Song, Y.M. ; Ju, G.W. ; Choi, H.J. ; Lee, Y.W. ; Na, B.H. ; Lee, Y.T.
Author_Institution :
Dept. of Electron. Eng., Pusan Nat. Univ., Busan, South Korea
Abstract :
Micro-scale, reflective-type optical displacement sensors have been developed by monolithic integration of vertical cavity surface-emitting lasers (VCSELs) and resonant cavity-enhanced photodetectors (RCEPDs). This compact sensor (700 × 700 μm) consists of an oxide-confined VCSEL that is surrounded by an RCEPD and can measure the linear distance with a measurement range of ~10 mm, which is comparable to that of conventional displacement sensors. Fabrication details and sensor performances are discussed.
Keywords :
displacement measurement; distance measurement; laser cavity resonators; optical sensors; photodetectors; surface emitting lasers; RCEPD; compact sensor; linear distance measurement; microscale reflective-type optical displacement sensors; monolithically integrated VCSEL; resonant cavity-enhanced photodetectors; vertical cavity surface-emitting lasers;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2015.0299
