Title :
Improved high precision optical angle measurement system with no interference of light gradients and mismatch
Author :
Oehm, J. ; Koch, Christian ; Stoychev, I. ; Gornik, A.
Author_Institution :
Analogue Integrated Circuits Res. Group, Ruhr-Univ. Bochum, Bochum, Germany
Abstract :
Previously presented optical angle detection systems for incoming light have been proven to be sensitive to inhomogeneities in the intensity distribution of incoming light rays. In addition, it was found that gradients in some wafer parameters may also have a considerable influence on the measurement accuracy. An improved sensor design is presented that uses a common centroid architecture. Influences from gradient effects in the intensity distribution of the light source as well as process mismatch are successfully overcome by this design.
Keywords :
light sources; optical sensors; optical variables measurement; common centroid architecture; gradient effects; high precision optical angle measurement system; incoming light rays; intensity distribution; light source; measurement accuracy; optical angle detection systems; process mismatch; sensor design; wafer parameters; Accuracy; Light emitting diodes; Light sources; Metals; Optical sensors; Optical variables measurement; Semiconductor device measurement;
Conference_Titel :
Electronics, Circuits and Systems (ICECS), 2012 19th IEEE International Conference on
Conference_Location :
Seville
Print_ISBN :
978-1-4673-1261-5
Electronic_ISBN :
978-1-4673-1259-2
DOI :
10.1109/ICECS.2012.6463764
