Scheduling jobs with time constraints between consecutive process steps in semiconductor manufacturing

Author

Klemmt, Andreas ; Monch, Lars

Author_Institution

Infineon Technol. Dresden GmbH, Dresden, Germany

fYear

2012

fDate

9-12 Dec. 2012

Firstpage

1

Lastpage

10

Abstract

In this paper, we consider flow shop scheduling problems for jobs with time constraints between consecutive process steps. We start by analyzing different types of time constraints that arise in semiconductor wafer fabrication facilities. A simple heuristic that sequentially schedules the jobs in a list scheduling manner is proposed. Moreover, a decomposition approach based on mixed integer programming is developed. The two approaches are compared by means of randomly generated problem instances.

Keywords

flow shop scheduling; integer programming; job shop scheduling; production facilities; semiconductor device manufacture; decomposition approach; flow shop scheduling problem; job scheduling; list scheduling; mixed integer programming; semiconductor manufacturing; semiconductor wafer fabrication facilities; time constraint; Dispatching; Job shop scheduling; Mathematical model; Processor scheduling; Schedules; Time factors;

fLanguage

English

Publisher

ieee

Conference_Titel

Simulation Conference (WSC), Proceedings of the 2012 Winter

Conference_Location

Berlin

ISSN

0891-7736

Print_ISBN

978-1-4673-4779-2

Electronic_ISBN

0891-7736

Type

conf

DOI

10.1109/WSC.2012.6465235

Filename

6465235