DocumentCode
597568
Title
Self-consistent quasi static CV characterization of Inx Ga1−x Sb buried channel n-MOSFET
Author
Islam, Md Shariful ; Alam, Md Nur Kutubul ; Islam, Md Rafiqul
Author_Institution
Dept. of Electr. & Electron. Eng., Khulna Univ. of Eng. & Technol., Khulna, Bangladesh
fYear
2013
fDate
2-4 Jan. 2013
Firstpage
94
Lastpage
96
Abstract
The quasi-static capacitance-voltage (CV) characteristics of buried channel n-InGaSb MOSFET is investigated using SILVACO´s ATLAS device simulation package. Self-consistent method is applied to solve the coupled one dimensional Schrödinger-Poisson equation taking into account of wave function penetration and strain effect. It is found that the CV profiles and threshold voltage are strongly depended on some important process parameters like oxide thickness, channel thickness, channel composition and temperature for buried channel InGaSb n-MOSFET.
Keywords
MOSFET; Poisson equation; Schrodinger equation; gallium compounds; indium compounds; InxGa1-xSb; SILVACO ATLAS device simulation package; buried channel n-MOSFET; channel thickness; one dimensional Schrodinger-Poisson equation; oxide thickness; self-consistent quasi static CV characterization; strain effect; threshold voltage; wave function penetration; Capacitance; Logic gates; MOSFET circuits; Materials; Performance evaluation; Strain; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanoelectronics Conference (INEC), 2013 IEEE 5th International
Conference_Location
Singapore
ISSN
2159-3523
Print_ISBN
978-1-4673-4840-9
Electronic_ISBN
2159-3523
Type
conf
DOI
10.1109/INEC.2013.6465964
Filename
6465964
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