High frequency SAW nanotransducer utilizing ultrananocrystalline diamond/ A1N bimorph architecture

Author

Dow, A.B.A. ; Lin, Huiming ; Popov, C. ; Schmid, Ulrich ; Kherani, Nazir P.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Toronto, Toronto, ON, Canada

fYear

2013

fDate

2-4 Jan. 2013

Firstpage

360

Lastpage

363

Abstract

This article reports on the development and realization of a super high frequency surface acoustic wave (SAW) nanotranducer architecture based on a bi-layer of aluminum nitride (AlN) and ultrananocrystalline diamond (UNCD). The SAW nanotransducer was fabricated on an AlN/UNCD structure using electron beam lithography and lift off processes. The SAW device consists of nano inter-digitated transducers (n-IDTs) at both the input and output ports. The fabricated devices exhibited response over a high frequency range, as high as 18.4 GHz, with minimal insertion losses. The good frequency characteristics of the fabricated devices and compatibility with existing fabrication technologies open the way for the realization of advanced AlN/UNCD based transducers.

Keywords

aluminium compounds; diamond; electron beam lithography; nanoelectronics; nanostructured materials; surface acoustic wave transducers; AlN; SAW device; SAW nanotranducer architecture; UNCD; aluminum nitride bilayer; bimorph architecture; electron beam lithography; fabricated devices; fabrication technology; frequency characteristics; high frequency SAW nanotransducer; high frequency range; lift off processes; minimal insertion losses; nano interdigitated transducers; super high frequency surface acoustic wave nanotransducer architecture; ultrananocrystalline diamond; Diamonds; Fabrication; Films; Nanobioscience; Sensors; Surface acoustic wave devices; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanoelectronics Conference (INEC), 2013 IEEE 5th International

Conference_Location

Singapore

ISSN

2159-3523

Print_ISBN

978-1-4673-4840-9

Electronic_ISBN

2159-3523

Type

conf

DOI

10.1109/INEC.2013.6466047

Filename

6466047