Design guidelines for (111) Si inclined nanohole arrays in thin film solar cells

In this paper, a systematic design and analysis of slanting silicon nanohole structure is simulated using the finite element method. The slanting nanohole structure is based on the Si (111) wafer. The impact of the hole diameter and structural periodicity has been investigated. It is found that the absorption is significantly enhanced due to the strong light trapping ability of slanting nanohole structure. The optimal structural parameters are achieved when the periodicity is 700 nm and the diameter to periodicity ratio is 0.85. The highest ultimate efficiency achieved is 32.9%, higher than that of vertical nanohole structure with a value of 29.7%.