Horizontally suspended carbon nanotube bundles patterned on silicon trench sidewalls

Arrays of horizontally suspended carbon nanotube (HSCNT) bundles were grown from selected silicon trench sidewalls with help of micromachining technologies. The key process is the patterning of an iron (Fe) catalyst layer onto selected silicon trench sidewalls through a shadow mask placed on top of silicon trenches by the tilted electron beam evaporation technique. These HSCNTs bundle arrays are promising in micro/nano electronics applications.