Title :
Time divided architecture for closed loop MEMS capacitive accelerometer
Author :
Jingqing Huang ; Tingting Zhang ; Meng Zhao ; Lichen Hong ; Yacong Zhang ; Wengao Lu ; Zhongjian Chen ; Yilong Hao
Author_Institution :
Dept. of Microelectron., Peking Univ., Beijing, China
fDate :
Oct. 29 2012-Nov. 1 2012
Abstract :
This paper mainly discusses issues concerning the architecture of time divided closed loop accelerometer. For this particular architecture mathematical relationship between the external acceleration detected by sensor and the voltage output of the readout circuits is deduced. Both Matlab/Simulink model and Verilog-A model for such architecture are established. Simulation results agree with the mathematical formula. Readout circuits designed to work under 50kHz with feedback duty cycle η being 60% are fabricated using 0.35μm HV CMOS process. Test results show a sensitivity of 1.518V/g.
Keywords :
CMOS integrated circuits; accelerometers; capacitive sensors; microsensors; readout electronics; HV CMOS process; Matlab/Simulink model; Verilog-A model; closed loop MEMS capacitive accelerometer; external acceleration; feedback duty cycle; frequency 50 kHz; readout circuits; size 0.35 mum; time divided architecture; time divided closed loop accelerometer; voltage output; Accelerometers; Electrostatics; Force; Integrated circuit modeling; MATLAB; Mathematical model;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2012 IEEE 11th International Conference on
Conference_Location :
Xi´an
Print_ISBN :
978-1-4673-2474-8
DOI :
10.1109/ICSICT.2012.6466758
