Future logic device technologies beyond the 28nm node

The presentation will discuss the future logic technologies beyond the 28 nm node, and novel device structure technologies, which include how far we can extend so far successful conventional semiconductor logic devices. First of all, logic device development trend that has been influenced by the business demands of mobile computing will be summarized. Then development in extended planar device application as a transitional period to 3 dimensional (3D) devices will be discussed followed by the key features FinFETs and future development of novel devices such as nanowire MOSFETs.