DocumentCode
599578
Title
Electromechanical response simulation of Film Bulk Acoustic wave resonator
Author
Serhane, Rafik ; Boutkedjirt, Tarek ; Hassein Bey, Abdelkader
Author_Institution
Division Microélectronique et Nanotechnologie, Centre de Développement des Technologies Avancées (CDTA), 20 Août 1956, Baba Hassen, Algiers DZ-16303, BP: 17, Algeria
fYear
2012
fDate
16-20 Dec. 2012
Firstpage
1
Lastpage
4
Abstract
The FBAR (Film Bulk Acoustic Resonator) is an ultrasonic transducer consisting of a piezoelectric film which is taken as sandwich between two planar metallic electrodes. The lateral dimensions of this MEMS (Micro Electro Machinated System) are considered very large compared to its thickness [1–3].
Keywords
FBAR; FEM; MEMS; SILVACO; Ultrasonic transducer; piezoelectricity;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics (ICM), 2012 24th International Conference on
Conference_Location
Algiers, Algeria
Print_ISBN
978-1-4673-5289-5
Type
conf
DOI
10.1109/ICM.2012.6471442
Filename
6471442
Link To Document