Design of a miniature 3-DOF flexure-based mechanism for micro/nano manipulation

Author

Clark, Leon ; Bhagat, Umesh ; Shirinzadeh, Bijan ; Chea, P. ; Qin, Yi ; Tian, Yanjun

Author_Institution

Dept. of Mech. & Aerosp. Eng., Monash Univ., Clayton, VIC, Australia

fYear

2012

fDate

Aug. 29 2012-Sept. 1 2012

Firstpage

210

Lastpage

215

Abstract

The work presented in this paper focuses on the design of a novel flexure-based mechanism capable of delivering planar motion with three degrees of freedom (3-DOF). Pseudo rigid body modeling (PRBM) and kinematic analysis of the mechanism are used to predict the motion of the mechanism in the X-, Y- and θ-directions. Lever based amplification is used to enhance the displacement of the mechanism. The presented design is small and compact in size (about 142mm by 110mm). The presented 3-DOF flexure-based miniature micro/nano mechanism delivers smooth motion in X, Y and θ, with maximum displacements of 142.09 μm in X-direction, 120.36 μm in Y-direction and 6.026 mrad in θ-rotation.

Keywords

manipulator kinematics; shear modulus; θ-rotation; PRBM; displacement enhancement; kinematic analysis; lever based amplification; micromanipulation; miniature 3-DOF flexure-based mechanism; motion prediction; nanomanipulation; planar motion; pseudorigid body modeling; Couplings; Fasteners; Force; Geometry; Kinematics; Springs; Stress; flexure mechanism; micro/nano manipulation; pseudo-rigid body model;

fLanguage

English

Publisher

ieee

Conference_Titel

Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2012 International Conference on

Conference_Location

Shaanxi

Print_ISBN

978-1-4673-4588-0

Electronic_ISBN

978-1-4673-4589-7

Type

conf

DOI

10.1109/3M-NANO.2012.6472940

Filename

6472940