Sliding mode control of a 2D torsional MEMS micromirror with sidewall electrodes

Author

Hui Chen ; Pallapa, Manu ; Weijie Sun ; Zhendong Sun ; Yeow, John T. W.

Author_Institution

Coll. of Autom. Sci. & Eng., South China Univ. of Technol., Guangzhou, China

fYear

2012

fDate

Aug. 29 2012-Sept. 1 2012

Firstpage

234

Lastpage

239

Abstract

In this paper, a first-order sliding mode controller is implemented to control the tilt angle of a 2-Degree-of-freedom (DOF) torsional MEMS micromirror with sidewall electrodes. Stability of the closed-loop system is proved by Lyapunov method. Furthermore, both the experimental and simulation results are shown to verify the effectiveness of the control scheme. It is demonstrated that the torsional MEMS micromirror with proposed sliding mode controller has good transient response and tracking performance.

Keywords

Lyapunov methods; closed loop systems; micro-optomechanical devices; microelectrodes; micromirrors; optical control; spatial variables control; stability; transient response; variable structure systems; 2-DOF torsional MEMS micromirror; 2-degree-of-freedom torsional MEMS micromirror; Lyapunov method; closed loop system stability; first-order sliding mode controller; sidewall electrodes; tilt angle control; tracking performance; transient response; Manufacturing; Nanoscale devices; 2D torsional MEMS micromirror; sidewall electrodes; sliding mode control (SMC);

fLanguage

English

Publisher

ieee

Conference_Titel

Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2012 International Conference on

Conference_Location

Shaanxi

Print_ISBN

978-1-4673-4588-0

Electronic_ISBN

978-1-4673-4589-7

Type

conf

DOI

10.1109/3M-NANO.2012.6472945

Filename

6472945