• DocumentCode
    600063
  • Title

    Finite element simulation of PTFE nano-film two-phase filter

  • Author

    Yankun Liu ; Wenzhong Lou ; Qingfan Shi ; Mingru Guo ; Peng Liu

  • Author_Institution
    Sch. of Phys., Beijing Inst. of Technol., Beijing, China
  • fYear
    2012
  • fDate
    Aug. 29 2012-Sept. 1 2012
  • Firstpage
    416
  • Lastpage
    419
  • Abstract
    With the development of nanotechnology and Micro-Electro-Mechanical System (MEMS) technology, micro-pores films are widely applied in the fabrication of important components of nano-devices and MEMS. It is found that micro-pores films have the effect on the separation of the two-phases and the fix of the phase interfaces, due to huge network structures and highly ordered distribution of pore structure. Based on the combined effects of the inertial impaction, the interception and the diffusion, PTFE membrane filter is adopted. Furthermore, we perform the simulation by the COMSOL Multiphysics, which reflects the filtering effect of the PTFE nano-film materials. Finally we study the simulation of the protective micro-particles in PTFE membrane materials.
  • Keywords
    finite element analysis; membranes; micromechanical devices; nanotechnology; COMSOL Multiphysics; MEMS technology; PTFE membrane filter; PTFE nanofilm two-phase filter; fabrication; finite element simulation; microelectromechanical system; micropores films; nanotechnology; Apertures; Films; Filtration; Mathematical model; Nanobioscience; Nanostructured materials; Filter; Finite Element Analysis; PTFE nano-film;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2012 International Conference on
  • Conference_Location
    Shaanxi
  • Print_ISBN
    978-1-4673-4588-0
  • Electronic_ISBN
    978-1-4673-4589-7
  • Type

    conf

  • DOI
    10.1109/3M-NANO.2012.6472965
  • Filename
    6472965