DocumentCode
600063
Title
Finite element simulation of PTFE nano-film two-phase filter
Author
Yankun Liu ; Wenzhong Lou ; Qingfan Shi ; Mingru Guo ; Peng Liu
Author_Institution
Sch. of Phys., Beijing Inst. of Technol., Beijing, China
fYear
2012
fDate
Aug. 29 2012-Sept. 1 2012
Firstpage
416
Lastpage
419
Abstract
With the development of nanotechnology and Micro-Electro-Mechanical System (MEMS) technology, micro-pores films are widely applied in the fabrication of important components of nano-devices and MEMS. It is found that micro-pores films have the effect on the separation of the two-phases and the fix of the phase interfaces, due to huge network structures and highly ordered distribution of pore structure. Based on the combined effects of the inertial impaction, the interception and the diffusion, PTFE membrane filter is adopted. Furthermore, we perform the simulation by the COMSOL Multiphysics, which reflects the filtering effect of the PTFE nano-film materials. Finally we study the simulation of the protective micro-particles in PTFE membrane materials.
Keywords
finite element analysis; membranes; micromechanical devices; nanotechnology; COMSOL Multiphysics; MEMS technology; PTFE membrane filter; PTFE nanofilm two-phase filter; fabrication; finite element simulation; microelectromechanical system; micropores films; nanotechnology; Apertures; Films; Filtration; Mathematical model; Nanobioscience; Nanostructured materials; Filter; Finite Element Analysis; PTFE nano-film;
fLanguage
English
Publisher
ieee
Conference_Titel
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2012 International Conference on
Conference_Location
Shaanxi
Print_ISBN
978-1-4673-4588-0
Electronic_ISBN
978-1-4673-4589-7
Type
conf
DOI
10.1109/3M-NANO.2012.6472965
Filename
6472965
Link To Document